3

Parylene Chemical Resistance


Resistance to Chemicals (Acids, Alkalis and Solvents)
Swelling (Thickness change, %) on immersion in various chemicals for 10 - 16m thickness film. (Typical values only)
 
 
Immersing condition
diX C
diX N
Typical Values
Epoxies
Urethanes
  Hydrochloric acid 10 %
75 / 120min
A
-0.28
A
+0.08
BC
CD
  Sulfuric acid 10 % 
75 / 120min
A
-0.28
A
+0.07
AB
CD
  Nitric acid 10 % 
75 / 120min
A
-0.28
A
+0.15
D
D
  Hydrofluoric acid 10 % 
50 / 120min
A
+0.09
A
+0.37
B
D
  NaOH solution 10 % 
75 / 120min
A
-0.28
A
+0.15
AB
BC
  NH4OH solution 10 % 
75 / 120min
A
-0.38
A
+0.15
A
BC
  Hydrogen peroxide water
50 / 120min
A
0.00
A
0.00
CD
CD
  n-Octane
75 / 120min
A
+0.28
A
+0.29
C
B
  Toluene 
75 / 120min
A
+1.32
A
+0.30
C
C
  Monochlorobenzene 
75 / 120min
A
+1.04
A
+0.37
D
  Pyridine 
75 / 120min
A
+0.28
A
+0.29
D
C
  2-Propanol (IPA) 
50 / 120min
A
0.00
A
+0.07
C
B
  Acetone 
50 / 120min
A
-0.09
A
+0.15
CD
C
A: Excellent resistance B: Good resistance C: Possible to use with difficulty D: No good to use
Typical Values of Epoxies and Urethanes are not tested by same condition but reference only.